Datasheet Silicon Microstructures SM9236-BCE-S-600-002

Ultra-Low Pressure
Digital Sensor
SM9233/SM9235/SM9236 Series
Gauge Pressure Sensors
FEATURES
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• Pressure ranges: 250 up to 600 Pa Gauge
Accuracy after Autozero: < 1%FS
16 bit I2C Digital interface
Pressure calibrated and temperature compensated output
Compensated temperature range: -20 to 85oC DESCRIPTION
The SM923x series are digital, ultra-low pressure sensors offering
state-of-the-art MEMS pressure transducer technology and CMOS
mixed signal processing technology to produce a digital, fully
conditioned, multi-order pressure and temperature compensated
sensor in JEDEC standard SOIC-16 package with a dual vertical
porting option. It is available in a gauge pressure configuration.
The total accuracy after board mount and system level autozero is
less than 1%FS. The excellent warmup behavior and long term
stability further assures its expected performance over the life of the …